Miniaturization of a Micro Coriolis Mass Flow Sensor with Lorentz Actuation
نویسنده
چکیده
In this paper we present a significant reduction in size of a micromachined Coriolis mass flow sensor without sacrificing resolution or range. The sensor has a flow range from 10 mg/h up to more than 1000 mg/h, which is equivalent to 10 ul/h to 1 ml/h water. The reduction is achieved by using a more localized magnetic field for the actuation of the sensor.
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